µPhase®
Sensing wave complexity
Interferometer for measurements of the surface and wavefront deformation.
µPhase® interferometers permit fast, high-precision measurements of the surface and wavefront deformation of reflective and transmitting components made from glass, plastics, metal, ceramics or similar materials. The objective and reliable results fulfill the highest quality management requirements. The non-contact measurement process helps prevent damage to the sample
The high-precision measurement is carried out over the entire surface and wavefront deformation of flat, spherical, cylindrical, toric and aspherical components

µPhase® 3.1/3.2/3.3.
Highly flexible
The Twyman Green interferometer sensor µPhase® is available in identical designs for different resolutions and can be integrated into your setup.
- Focusing and adjustment of surface reflectivity is possible (µPhase® 3.3 only)
- Integration in manufacturing machines and production lines is possible

µPhase® PLANO DOWN
Compact structure
µPhase® PLANO DOWN with its compact design is suitable for the measurement of flat components in research and development as well as in production
- Measurement range for diameters of up to 150 mm
- Samples are placed on the granite plate and measured from the top
- Vibration insulation is usually not required since the unit has a solid granite base
- Compact design and small footprint

µPhase® PLANO UP
Plan lenses in production
For a cost-efficient quality control of optical flat surfaces in production µPhase® PLANO UP is the perfect choice.
- Measurement range for diameters of up to 100 mm
- Compact design for small spaces, can be placed right next to the production machine
- Samples are positioned at the top of the unit on a ring chuck or three-point support and measured from below

µPhase® SPHERO UP
Spheres in production
Spherical surfaces can be controlled fast and cost-effectively in production with the µPhase® SPHERO UP.
- Measurement range for diameters of up to 50 mm
- Compact design for small spaces, can be placed right next to the production machine
- Samples are positioned at the top of the unit on a ring chuck or three-point support and measured from below

µPhase® ST/ST+R
Flexible and cost-efficient
µPhase® ST/ST+R can be used flexibly and cost-effectively in research and development as well as in production.
- Measurement of flat and spherical samples
- Compact table top stand for vertical measurements with small footprint
- Optimal sample alignment with integrated tip/tilt and xy translation stage

µPhase® VERTICAL
Versatile
Highly flexible and fully equipped interferometer system for manufacturing, workshops and laboratories
- Motorized vertical z axis
- Unique design for all types of reflection and transmission measurements
- Integrated automatic radius measurement

µPhase® UNIVERSAL
Highest variability
Due to its multi-purpose structure and modular design µPhase® UNIVERSAL offers highest variability in research and development
- 2, 4 or 6-inch measurement system for the testing of flat and spherical surfaces
- Horizontal structure for the measurement of long radii
- Compatible with other conventional 4-inch lenses

µPhase® Customized Solutions
Application specific development
Its modular structure and compact design make the µPhase® a highly versatile interferometer – even beyond usual measurement requirements.
- Customized solutions for special applications can be implemented based on standard components
- Development of additional customized components and software modules