μPhase® interferometers offer objective and precise measurement results of surface and wavefront measurements – quickly and reliably.
μPhase® interferometers are compact, small and lightweight digital tools which can be used in almost any working environment. These measuring devices are perfectly complemented by the μShape™ measurement and analysis software to fulfill the highest expectations of quality management.
The μPhase® Interferometer systems are used for measuring specular high precision components made of glass, plastic, metal or ceramic etc. The non-contact measurement method prevents damage to the sample under test, and gives the most exact evaluation of the entire surface or wavefront.
TRIOPTICS offers μPhase® interferometers as self-contained modular parts as well as predefined turnkey solutions.
More information about Twyman-Green und Fizeau-Interferometers.
The µPhase® Sensor is part of all high-precision TRIOPTICS interferometry solutions
The µPhase® PLANO DOWN systems offer flatness testing in a very compact design
The µPhase® PLANO UP systems enable flatness testing in an extremely compact setup. Best suitable for production use.
The µPhase® SPHERO UP systems enable testing of spherical surfaces in an extremely compact setup
The µPhase® VERTICAL is designed for flexible measurements of flat, spherical, cylindrical, toric and aspheric surfaces and wave fronts and radius
The µPhase® UNIVERSAL is the most flexible interferometer solution in a horizontal setup.
Customized Interferometer Systems